| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10676110 | Vacuum | 2012 | 5 Pages |
Abstract
⺠Planar magnetron is used as a source of ions for milling devices. ⺠Hall-bar and nanowire structures fabricated from Ta/Ni/Ta trilayer films on GaAs. ⺠Magnetic device structures patterned by optical and electron-beam lithography.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
A.T. Hindmarch, D.E. Parkes, A.W. Rushforth,