Article ID Journal Published Year Pages File Type
10676112 Vacuum 2012 5 Pages PDF
Abstract
► GZO films by pulsed DC sputter with a rotating cylindrical target were prepared. ► The film deposited at 230 °C exhibited the best electrical and optical properties. ► The same film also showed crater-like surface after etching in HCl solution. ► The films can be used as an anti-reflective window electrode for photovoltaic cells.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Preview
Effect of the substrate temperature on the properties of Ga-doped ZnO films for photovoltaic cell applications deposited by a pulsed DC magnetron sputtering with a rotating cylindrical target
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