| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10676118 | Vacuum | 2012 | 6 Pages |
Abstract
⺠Al-doped ZnO film as TCO of thin film solar cells by dc magnetron sputtering at room temperature. ⺠Quality of films is affected by incident impurity ratio. ⺠Electrical and optical properties of AZO films can be improved at high substrate temperature. ⺠Mobility and carrier concentration are improved by increased crystallinity, preferred orientation, and grain size.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Wonkyun Yang, S.M. Rossnagel, Junghoon Joo,