Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10676183 | Vacuum | 2005 | 5 Pages |
Abstract
Some results of an investigation on the layer thickness uniformity of glancing angle deposition are presented. A zirconia monolayer has been deposited by glancing angle deposition to analyze the layer thickness uniformity. The experimental results indicate that the thickness variation over the substrate is less than 0.1%, which is considered as good uniformity. It is found that the non-uniformity of experimental results is larger than that of the theoretical results.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Jianguo Wang, Jianda Shao, Kui Yi, Zhengxiu Fan,