Article ID Journal Published Year Pages File Type
10676227 Vacuum 2011 5 Pages PDF
Abstract
► Double electrostatic probe method and Boltzmann-plot method are applied. ► Excitation temperature is appreciably lower than the electron temperature. ► Attempts are made to measure the gas temperature by using a pair thermocouple. ► Thermocouple method contains large errors due to rarefied-gas heat transfer effects.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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