| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10676228 | Vacuum | 2011 | 5 Pages |
Abstract
⺠The ultimate pressure of 7.9 à 10-10 Pa was generated by the combination of turbomolecular pump and NEG pump. ⺠The lower limit of the static expansion vacuum standard can be extended to 10â7 Pa by using the NEG pump when an inert gas is used as the test gas. ⺠The lower limit of the constant conductance method vacuum leak standard is hopeful to be extended to less than 10â10 Pa m3/s in the same way.
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Surfaces, Coatings and Films
Authors
Li Detian, Cheng Yongjun,