| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10676229 | Vacuum | 2011 | 5 Pages |
Abstract
⺠In this paper, ZnO:Cu thin films with c-axis preferred orientation were prepared on Si substrates by radio frequency magnetron sputtering technique. ⺠XRD and AFM measurements indicated that the grain orientation of the films was promoted by appropriate oxygen partial pressures. ⺠And with increasing oxygen ratio, the compressive stress of the films increased first and then decreased. ⺠A violet peak, two blue peaks and a green peak were observed from the PL spectra of the four samples. The origin of these emissions was discussed.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Y.M. Tao, S.Y. Ma, H.X. Chen, J.X. Meng, L.L. Hou, Y.F. Jia, X.R. Shang,