Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10676230 | Vacuum | 2011 | 6 Pages |
Abstract
⺠The experimental measurement of silicon volatilization rate was carried out. ⺠The experimental values were obtained at different evaporation time and temperatures. ⺠Silicon volatilization is comprised of formation and maintaining vapor-liquid equilibrium. ⺠The equation for calculating the volatilization rates of silicon revised as Ï = (2.23â¼6.30)Ã10â1ppa(M/T)1/2.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Kuixian Wei, Wenhui Ma, Bin Yang, Dachun Liu, Yongnian Dai, Kazuki Morita,