Article ID Journal Published Year Pages File Type
10676230 Vacuum 2011 6 Pages PDF
Abstract
► The experimental measurement of silicon volatilization rate was carried out. ► The experimental values were obtained at different evaporation time and temperatures. ► Silicon volatilization is comprised of formation and maintaining vapor-liquid equilibrium. ► The equation for calculating the volatilization rates of silicon revised as ω = (2.23∼6.30)×10−1ppa(M/T)1/2.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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