Article ID Journal Published Year Pages File Type
10676231 Vacuum 2011 6 Pages PDF
Abstract
► A sorption model for the case of the films with a reactive component has been built. ► The notion of the relative sorption capacity has been analyzed and improved. ► The dependence of sorption capacity on gas pressure above the film has been found. ► A new method of increasing the lifetime of vacuum devices is discussed.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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