Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10676231 | Vacuum | 2011 | 6 Pages |
Abstract
⺠A sorption model for the case of the films with a reactive component has been built. ⺠The notion of the relative sorption capacity has been analyzed and improved. ⺠The dependence of sorption capacity on gas pressure above the film has been found. ⺠A new method of increasing the lifetime of vacuum devices is discussed.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
K. Chuntonov, A. Ivanov, D. Permikin,