Article ID Journal Published Year Pages File Type
10676236 Vacuum 2011 6 Pages PDF
Abstract
► Influence of different rotation speeds of substrate on nanostructure of Cu thin films is investigated. ► Nanostructure and crystallography are determined using AFM, SEM and XRD. ► Optical functions of these Cu films are obtained by optical fitting of spectrophotometer data.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Preview
Influence of substrate rotation speed on the nanostructure of sculptured Cu thin films
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