Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10676271 | Vacuum | 2005 | 7 Pages |
Abstract
The dielectric constant and the dielectric loss of tantalum pentoxide (Ta2O5) thin films, produced by sol-gel spin-coated process on Corning glass substrates, have been investigated in the frequency range of 20-105Â Hz and the temperature range of 183-403Â K, using ohmic Al electrodes. The frequency and temperature dependence of relaxation time has also been determined. The capacitance and loss factor were found to decrease with increasing frequency and increase with increasing temperature. The activation energy values were evaluated and a good agreement between the activation energy values obtained from capacitance and dielectric loss factor measurements were observed.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
S. Yildirim, K. Ulutas, D. Deger, E.O. Zayim, I. Turhan,