Article ID Journal Published Year Pages File Type
10676492 Vacuum 2005 6 Pages PDF
Abstract
The Fourier spectra of signals and the modulation transfer functions are chosen as main characteristics of the electron beam (EB) analyzers. This approach can be used for EB analyzer design and optimization. It is concluded that the space-frequency characteristics of the scanning (modulation) system are the limiting factors for the signal distortion. A matrix of more than 32×32 sufficiently short impulses and at a transfer rate twice higher than the maximum spectrum frequency can create an adequate image of the beam current radial or angular distribution. At the data processing of the rotating probe or of the moving slit measurements an inverse transformation is needed and a false minimum can appear in the calculated current distributions.
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Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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