Investigation of quasi lateral-field-excitation on (yxl)-17° LiNbO3 single crystal

Quasi lateral-field-excitation (LFE) on LiNbO3 crystal is investigated both theoretically and experimentally. It is found that when the driving electric field direction is parallel to the crystallographic X-axis of the piezoelectric substrate, (yxl)-17° LiNbO3 LFE bulk acoustic wave devices work on quasi-LFE mode. The experimental results agreed with the theoretical prediction well. The results provide the cut of LiNbO3 crystal for quasi-LFE bulk acoustic wave devices, which is important for designing high performance LFE sensors on LiNbO3 substrates.