| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10690591 | Ultrasonics | 2013 | 7 Pages |
Abstract
⺠Influence of the edge shape of the FBAR was investigated using FEM. ⺠Decreasing of the edge angle of the top electrode induced a deterioration of Q. ⺠This Q deterioration can be compensated by the side etching of the piezo-film. ⺠We experimentally obtained the significant refinement by applying the optimal shape.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Acoustics and Ultrasonics
Authors
Motoaki Hara, Masanori Ueda, Yoshio Satoh,