| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10690755 | Ultrasonics | 2005 | 8 Pages |
Abstract
Effects of electrode on high-overtone bulk acoustic resonator (HBAR) spectra are analyzed by numerical simulation. The figure of merit (FOM), the effective electromechanical coupling factor, keff2(m), and the quality factor Qs of the unique mode are discussed based on the resonance spectra of the HBAR. It is demonstrated that electrodes with proper acoustic impedance and thickness could improve the performance of the HBAR, or degrade the performance if the electrodes are not properly chosen.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Acoustics and Ultrasonics
Authors
Hui Zhang, Shu-Yi Zhang, Kai Zheng,