Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10707099 | Journal of Crystal Growth | 2012 | 9 Pages |
Abstract
⺠Polycrystalline InP films were deposited by RF magnetron sputtering technique. ⺠The role of substrate temperature on composition, structural, electrical and optical properties is reported. ⺠Conical shaped grain growth was observed in the films. ⺠Electron backscattered diffraction and Raman scattering techniques were used for microstructural characterization. ⺠Correlation between structural, microstructural, electrical and optical properties are presented.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
G. Hema Chandra, J.Pérez de la Cruz,