Article ID Journal Published Year Pages File Type
10707099 Journal of Crystal Growth 2012 9 Pages PDF
Abstract
► Polycrystalline InP films were deposited by RF magnetron sputtering technique. ► The role of substrate temperature on composition, structural, electrical and optical properties is reported. ► Conical shaped grain growth was observed in the films. ► Electron backscattered diffraction and Raman scattering techniques were used for microstructural characterization. ► Correlation between structural, microstructural, electrical and optical properties are presented.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
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