Article ID Journal Published Year Pages File Type
10707122 Journal of Crystal Growth 2012 5 Pages PDF
Abstract
► CdTe layers deposited with an inline AP-MOCVD process as an alternative path to high throughput process. ► Over 40% material utilisation can be achieved depending on deposition parameters. ► Substrate temperature and total flow were critical parameters. ► The activation energy was found to be 49 kJ mol−1 and in agreement with literature.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
Authors
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