| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10707168 | Journal of Crystal Growth | 2011 | 8 Pages |
Abstract
⺠BeO is an excellent electrical insulator, but good thermal conductor. ⺠Highly crystalline film of novel BeO has been grown using ALD. ⺠ALD BeO precursor is not commercially available so it is synthesized directly. ⺠ALD BeO crystallinity has been investigated in this study.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
J.H. Yum, T. Akyol, M. Lei, D.A. Ferrer, Todd.W. Hudnall, M. Downer, C.W. Bielawski, G. Bersuker, J.C. Lee, S.K. Banerjee,