Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10707221 | Journal of Crystal Growth | 2011 | 4 Pages |
Abstract
We show that non-polar M-plane and A-plane GaN can be grown on LiGaO2 with very high phase purity. The morphology of the GaN surfaces is influenced by the underlying substrate morphology, which exhibits a high abundance of surface scratches. Nevertheless, the root-mean-square roughness of the samples is low, i.e. 2.9Â nm for M-plane GaN and 10Â nm for A-plane GaN. The predominant defects in the GaN films are threading dislocations and stacking faults.
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Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
R. Schuber, Y.L. Chen, C.H. Shih, T.H. Huang, P. Vincze, I. Lo, L.W. Chang, Th. Schimmel, M.M.C. Chou, D.M. Schaadt,