| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10707331 | Journal of Crystal Growth | 2011 | 4 Pages |
Abstract
We give an overview on the fabrication and applications of deep nanoholes in semiconductor surfaces generated by self-assembled drilling with liquid metal droplets as etchant. The method is fully compatible with conventional molecular beam epitaxy equipment. We discuss the mechanism of nanohole formation and two applications: the creation of GaAs quantum rings and of GaAs quantum dots by nanohole filling.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Ch. Heyn, A. Stemmann, M. Klingbeil, Ch. Strelow, T. Köppen, S. Mendach, W. Hansen,