Article ID Journal Published Year Pages File Type
10707416 Journal of Crystal Growth 2011 5 Pages PDF
Abstract
We have performed 3D calculations of the melt flow during Czochralski growth of nearly square-shaped silicon crystals by means of Ansys-cfx. Beforehand, the temperature field in the furnace has been computed by axisymmetric computations using CrysMAS for providing thermal boundary conditions for the local simulation of the melt flow. CrysMAS has been also used for the computations of Lorentz force densities, produced by a travelling magnetic field using the KRISTMAG˜® approach.
Related Topics
Physical Sciences and Engineering Physics and Astronomy Condensed Matter Physics
Authors
, , ,