Selective growth of ZnO nanoneedles on Si substrates by metalorganic chemical vapor deposition

A high density of aligned ZnO nanoneedles was selectively grown on carbon-coat patterned Si substrates. The ZnO nanoneedles were synthesized by metalorganic chemical vapor deposition using diethylzinc and oxygen gas. The growth temperature was 480 °C. The grown ZnO nanoneedles had single crystalline atomic structure and pure compositions with no any impurities. The nanoneedles showed a strong near-bandedge PL emission at 3.29 eV with no significant deep-level emission peaks.