| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10717154 | Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | 2005 | 8 Pages |
Abstract
The design of efficient lamellar multilayer amplitude grating (LMAG) monochromators in terms of bandwidth and peak reflectivity for the soft-X-ray domain, covering the K emission of low atomic-number elements: B to Si, is considered. A Mo/B4C LMAG suited for spectrometry in this spectral domain has been designed, fabricated using electron beam lithography together with reactive ion etching and tested with success.
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Instrumentation
Authors
Rabah Benbalagh, Jean-Michel André, Robert Barchewitz, Philippe Jonnard, Gwénaelle Julié, Laurent Mollard, Guy Rolland, Christian Rémond, Philippe Troussel, Rémy Marmoret, Elena O. Filatova,