Article ID Journal Published Year Pages File Type
10726919 Physics Letters A 2011 5 Pages PDF
Abstract
► Few works can be found regarding the deposition of AlN on amorphous substrate. ► AlN crystal growth on amorphous substrate has been studied, which is important to AlN/DLC SAW applications. ► Evolution of preferential orientation of AlN film with different N2 pressure is deeply discussed.
Keywords
Related Topics
Physical Sciences and Engineering Physics and Astronomy Physics and Astronomy (General)
Preview
Growth of preferentially-oriented AlN films on amorphous substrate by pulsed laser deposition
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