Impact of Ge alloying on the early growth stages, microstructure and stress evolution of sputter-deposited Cu-Ge thin films

Article ID	Journal	Published Year	Pages	File Type
11006774	Acta Materialia	2018	38 Pages	PDF

Keywords

Intrinsic stress Thin films

Related Topics

Physical Sciences and Engineering Materials Science Ceramics and Composites

Impact of Ge alloying on the early growth stages, microstructure and stress evolution of sputter-deposited Cu-Ge thin films

Authors

C. Furgeaud, L. Simonot, A. Michel, C. Mastail, G. Abadias,