| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 11007091 | Surface and Coatings Technology | 2018 | 23 Pages |
Abstract
The evolution upon annealing from room temperature to 600â¯Â°C of the microstructure of Co/Mo2C/Y and Co/Y/Mo2C multilayer stacks has been studied by transmission electron microscopy combining HAADF-STEM, EDX and HRTEM. Both kinds of samples show significant amount of intermixing even in the as-deposited state. The mixing further increases upon annealing. Most of the mixing occurs between the Co and the Mo elements, the Y layers staying comparatively preserved. After annealing at 600â¯Â°C a surprising sharpening of the interfaces is observed. It is ascribed to the formation of Co-Mo compounds. Combining these analyses with the results we have already published, we can explain in a consistent way the evolution of the x-ray reflectivity measurements of the samples upon annealing. Understanding the evolution the optical properties of such stacks designed to work in the soft x-ray range is essential for improving the optical performance of multilayer structures.
Related Topics
Physical Sciences and Engineering
Materials Science
Nanotechnology
Authors
Yanyan Yuan, Karine Le Guen, Christian Mény, Corinne Bouillet, Jingtao Zhu, Zhanshan Wang, Philippe Jonnard,