| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 11007106 | Surface and Coatings Technology | 2018 | 31 Pages |
Abstract
To allow direct calorimetric measurement of a high voltage pulsed substrate, a common passive thermal probe (PTP) was modified utilizing a fiber optic temperature sensor. With this probe, the effect of PBII voltage, substrate distance and pressure, on the energy flux and ion current towards the PBII substrate was investigated as a function of the delay between HiPIMS and PBII pulse. The results were successfully compared to a basic model and revealed important information regarding substrate position, process pressure and the effect of secondary electrons in this combined system.
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Authors
Sven Gauter, Maik Fröhlich, Holger Kersten,