| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 11007109 | Surface and Coatings Technology | 2018 | 9 Pages |
Abstract
According to the mass spectrometry results, the contribution of low and intermediate energetic parts (ions with energies below 20Â eV) to Ti+ ion energy distribution functions significantly increases during ultra-short and multi-pulse HiPIMS discharge. The highest ion flux fraction (up to 52%) was measured for the multi-pulse HiPIMS operation mode. The hardest coatings, with the highest H/E and H3/E2 ratios and lowest kinetic coefficient of friction were found to be the TiN thin films deposited by multi-pulse HiPIMS.
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Authors
Vasile Tiron, Ioana-Laura Velicu, Daniel Cristea, Nicoleta Lupu, George Stoian, Daniel Munteanu,