Microbolometric theoretical responsivity analysis for focal plane array under pulse current bias

Based on the physical thermal balance equation of the microbolometer under pulse current bias, the microbolometric theoretical infrared responsivity is given out in this paper. The operating temperature of the microbolometer during the pulse current bias period is theoretically discussed and analyzed, from which the microbolometric theoretical infrared responsivity expression is derived for high-speed microbolometric focal plane array. The microbolometric theoretical infrared responsivity expression reveals some key factors to decide the infrared sensitivity of the microbolometric focal plane array and has been successfully verified through an experimental microbolometric focal plane array. The microbolometric theoretical infrared responsivity expression is theoretically strict and can be utilized for future microbolometric focal plane arrays with some high-performance characteristics parameters such as high-speed and small-pixel.