Design and research on large displacement bidirectional MEMS stage with interlock mechanism

The design, fabrication and characterization of a large displacement bidirectional MEMS stage is presented in this paper. The V-shape electro-thermal actuator, micro lever, pawl and slider are investigated respectively. With 11 V driven voltages, these basic components can generate 15 mN output force and realize pulling, disengaging and reengaging to move the stage forward and backward smoothly (1 mm displacement in bi-direction). The rack and interlock mechanism formed by the pawl and slider make the device to have the features of linear output displacement, low power consumption, input signal recognition and displacement sustaining. SOI wafer is introduced in the fabrication process, and the 1.2 × 3.5 mm2 movable plate can be actuated successfully.