Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
11023599 | Sensors and Actuators A: Physical | 2018 | 21 Pages |
Abstract
According to their inherent characteristics, MEMS resonant accelerometers are suitable for low-frequency, low-g acceleration measurement. In this paper, we report a MEMS accelerometer based on double-ended-tuning fork resonators. The scale factor of our sensor is 1153.3â¯Hz/g and the bias stability of the oscillator is 58 ppb (parts per billion) for an averaging time of 1â¯s. The static test showed that the resolution of our sensor was 13.8â¯Î¼g. The dynamic performance was demonstrated by single-frequency and hybrid-frequency vibration tests, and the results showed that our device is suitable for detecting low-frequency vibration (0.5-5â¯Hz). The cross-axis sensitivity is 1.33%. Compared with a standard charge accelerometer, our device showed its superiority in mixed acceleration measurement, which makes it a potentially attractive option for geophone or seismometer applications.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Shudong Wang, Xueyong Wei, Yulong Zhao, Zhuangde Jiang, Yajing Shen,