Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
11263348 | Sensors and Actuators A: Physical | 2018 | 10 Pages |
Abstract
Bragg grating sensors are used for real-time analysis of gases or liquids. Complex processing methods are typically required for the sensor fabrication. A reduction of process steps and costs during their fabrication is essential in order to broaden the field of application. Within this work, we demonstrate an innovative process for a one-step fabrication of integrated Bragg grating sensors and their successful application for temperature and refractive index sensing. UV-enhanced substrate conformal imprint lithography (UV-SCIL) is used to replicate surface relief Bragg grating (SBG) sensors on a full wafer scale. Multiple chips of a planar waveguide system including couplers and junctions were etched into a silicon wafer. Nanostructured SBGs were locally added on the waveguides by focused ion beam processing. The sensor structures were replicated by UV-SCIL into a commercially available hybrid polymer (OrmoComp®). Reflection measurements with different Bragg gratings were performed and compared to simulations. The results reveal narrow-band Bragg reflections, coinciding with the simulations. Further, the temperature dependence of the SBGs was investigated. The imprinted grating structures featured a very high temperature sensitivity of â202âpm/°C. The sensor response to a varying refractive index of the surrounding medium was determined for index matching liquids and aqueous solutions.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
M. Förthner, M. Girschikofsky, M. Rumler, F. Stumpf, M. Rommel, R. Hellmann, L. Frey,