Multiple-pulse Laser-induced breakdown spectroscopy for monitoring the femtosecond laser micromachining process of glass

Laser-induced breakdown spectroscopy (LIBS) can be applied for laser micromachining not only as a tool for determining the chemical composition of the sample but also for monitoring the process itself. Multiple pulses in comparison to a single pulse improve the analytical performance of LIBS, enable special applications and increase the ablation rate in laser material processing. In this report, we present results on the application of multiple-pulse LIBS in monitoring the micromachining of soda-lime glass with femtosecond high repetition rate pulses.