Elemental Fractionation Studies of 193 nm ArF Excimer Laser Ablation System at High Spatial Resolution Mode

The limit of detection (LOD), ICP mass load effect, downhole induced fractionation and matrix effect of 193 nm ArF excimer laser ablation system at high spatial resolution were systematically investigated. Trace elements in GSD-1G, StHs6/80-G and NIST612 were measured at 10 μm spot size. The results showed that the LOD decreased with the increasing ablation diameter. In addition, the LOD of part of trace elements was in a range of 1–10 μg g−1 at 7 μm spot size. Mass load effect was negatively correlated with the corresponding oxide melting temperature, while positively correlated with the elemental 1st ionization potential. Downhole fractionation was negligible when the ratio of ablation depth to spot size was smaller than 1:1. Matrix effect between NIST610, GSD-1G, ATHO-G and StHs6/80-G did not change in the spot size ranged from 10 μm to 50 μm. The analytical results of GSD-1G, StHs6/80-G and NIST612 at 10 μm spot size matched well with the reference values. Generally, 10 μm spatial resolution could satisfy the requirements of trace elements analysis.

Graphical abstractThe limit of detection, mass load effect, downhole induced fractionation and matrix effect of 193 nm ArF excimer laser at high spatial resolution (< 15 μm) were symmetrically investigated. The results showed that the downhole induced fractionation was negligible when the ratio of ablation depth to spot size was smaller than 1:1.Figure optionsDownload full-size imageDownload as PowerPoint slide