Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
12018901 | Journal of Crystal Growth | 2019 | 22 Pages |
Abstract
300-nm-thick AlInN films with InN molar fractions ranging from 0.114 to 0.197 were grown by metalorganic chemical vapor deposition on c-plane GaN on sapphire. It was confirmed that no lattice relaxation occurred for samples with InN molar fractions from 0.144 to 0.197, and the InAlN films with low InN molar fractions showed a relative smooth surface. However, it turned into a granular surface morphology resulting from a columnar polycrystalline structure when the InN molar fraction exceeded a compositional boundary of in-plane lattice matching. As for the smooth-surface AlInN single-layers, the optical constants as well as energy bandgaps were determined.
Keywords
Related Topics
Physical Sciences and Engineering
Physics and Astronomy
Condensed Matter Physics
Authors
Makoto Miyoshi, Mizuki Yamanaka, Takashi Egawa, Tetsuya Takeuchi,