Article ID Journal Published Year Pages File Type
1233641 Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy 2009 5 Pages PDF
Abstract

The photothermal detection technique is an innovative and non-contact method to investigate the properties of films on workpieces. This paper describes a novel experimental set-up for thickness microscopy based on photothermal radiometry. The correlation between the thermal wave signal and the film thickness is deduced and evaluated to determine the film thickness with a lateral resolution of less than 1 mm. Results indicate that the thickness microscopy is a useful method to characterize thin films and has the potential to be applied in-process.

Related Topics
Physical Sciences and Engineering Chemistry Analytical Chemistry
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