Contribution of inner shell Compton ionization to the X-ray fluorescence line intensity

•XRF emission from Compton ionization has been studied in detail for the lines K, L and M.•Effect of Compton ionization on the XRF intensity is not negligible, particularly for L and M lines.•Energies to reach certain extent corrections (1, 5, 10, 20, 50 and 100%) are given as a function of Z.•Single shell Compton ionization cross sections are computed in the Impulse Approximation.•Single shell photoelectric cross section from two data libraries (MCMASTER and EPDL97) are compared.

The Compton effect is a potential ionization mechanism of atoms. It produces vacancies in inner shells that are filled with the same mechanism of atomic relaxation as the one following photo-absorption. This contribution to X-ray fluorescence emission is frequently neglected because the total Compton cross-section is apparently much lower than the photoelectric one at useful X-ray energies. However, a more careful analysis suggests that is necessary to consider single shell cross sections (instead of total cross sections) as a function of energy. In this article these Compton cross sections are computed for the shells K, L1-L3 and M1-M5 in the framework of the impulse approximation. By comparing the Compton and the photoelectric cross-section for each shell it is then possible to determine the extent of the Compton correction to the intensity of the corresponding characteristic lines. It is shown that for the K shell the correction becomes relevant for excitation energies which are too high to be influent in X-ray spectrometry. In contrast, for L and M shells the Compton contribution is relevant for medium-Z elements and medium energies. To illustrate the different grades of relevance of the correction, for each ionized shell, the energies for which the Compton contribution reaches the extent levels of 1, 5, 10, 20, 50 and 100% of the photoelectric one are determined for all the elements with Z = 11–92. For practical applications it is provided a simple formula and fitting coefficients to compute average correction levels for the shells considered.