Novel parallel vacuum ultra-violet/X-ray fluorescence spectrometer

Novel instrumentation developments in X-ray spectroscopy for parallel spectral measurements with soft X-rays are described. The significant performance improvements are achieved utilising Fresnel diffraction from structures built onto the surface of a total external reflection mirror. An array of reflection zone plates was tested as a wavelength-dispersive fluorescence spectrometer for soft X-rays in the energy range of 100–550 eV.

► C Kα, N Kα and Ti Lα,β fluorescence lines were recorded simultaneously. ► Energy resolution of the spectrometer 100 times higher than semiconductor type. ► Continuous parallel registration of soft X-ray spectra with extra-high sensitivity is possible.