Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1241380 | Spectrochimica Acta Part B: Atomic Spectroscopy | 2007 | 5 Pages |
Abstract
Differential interference contrast is a potentially powerful technique for contrast enhancement in soft X-ray microscopy. We describe the design and fabrication of single-element diffractive optical elements suitable as objectives for high-resolution differential interference contrast microscopy in the water-window spectral range. A one-dimensional pattern calculation followed by an extension to two dimensions results in a pattern resolution of 1Â nm, which is well below fabrication accuracy. The same fabrication process as for normal zone plates is applicable, but special care must be taken when converting the calculated pattern to a code for e-beam lithography.
Related Topics
Physical Sciences and Engineering
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Analytical Chemistry
Authors
Magnus Lindblom, Tomi Tuohimaa, Anders Holmberg, Thomas Wilhein, Hans M. Hertz, Ulrich Vogt,