Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1297613 | Solid State Ionics | 2006 | 7 Pages |
Abstract
Cubic and tetragonal Y2O3-doped ZrO2 thin films were deposited with a dense surface morphology by electrostatic spray deposition. Four dependent process parameters – substrate temperature, precursor solution flow rate, nozzle to substrate distance and the deposition time – have been used to control the process. Temperature dependent Raman spectroscopy and X-ray diffraction were performed in order to investigate the crystallization behavior and structural properties.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
R. Neagu, E. Djurado, L. Ortega, T. Pagnier,