| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1300601 | Coordination Chemistry Reviews | 2011 | 26 Pages |
Abstract
Gallium and indium oxide thin films have received much attention in recent years for their wide range of applications. This review summarises the literature concerning single-source precursors and the methods employed to deposit gallium and indium oxide thin films using these compounds. An update of the literature outlining compounds which are potential single-source precursors to these materials is also included.
Related Topics
Physical Sciences and Engineering
Chemistry
Inorganic Chemistry
Authors
Leanne G. Bloor, Claire J. Carmalt, David Pugh,