| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1328651 | Journal of Organometallic Chemistry | 2005 | 8 Pages |
Abstract
The synthesis of diverse ene-yne copper(I) β-diketonates (β-diketonate = acac, dbac, hfac) is described. Preliminary studies of one sample as CVD precursor in the deposition of copper onto TiN-coated oxidised silicon wafers is reported as well.
Related Topics
Physical Sciences and Engineering
Chemistry
Inorganic Chemistry
Authors
Y. Shen, T. Rüffer, S.E. Schulz, T. Gessner, L. Wittenbecher, H.-J. Sterzel, H. Lang,