Effects of Mg doping on the properties of highly transparent conductive and near infrared reflective Zn1−xMgxO:Ga films

Highly transparent conductive and near infrared (IR) reflective Gallium-doped ZnMgO (Zn1−xMgxO:Ga) films with Mg content from 0 to 10 at% were deposited on glass substrate by DC reactive magnetron sputtering. X-ray diffraction shows all the ZnMgO:Ga films are polycrystalline and have wurtzite structure with a preferential c-axis orientation. Hall measurements indicate that the resistivity of these films obviously increases with the Mg concentration increasing. The average transmittance of Zn1−xMgxO:Ga films is over 90% in the visible range. All the Zn1−xMgxO:Ga films have low transmittance and high reflectance in the IR region.

Graphical abstractThe figure shows transmittance and reflectance spectra of Zn1-xMgxO:Ga films measured in the wavelength range of 300–2500 nm. In the visible region the films are highly transparent, and their spectra are like those of dielectrics regardless of Mg content. In the IR region the films behave like metals and have high reflectance and low transmittance.Figure optionsDownload full-size imageDownload as PowerPoint slide