| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1429593 | Materials Science and Engineering: C | 2012 | 6 Pages |
Abstract
⺠The electrodes were fabricated by thermal oxidization and traditional IC process. ⺠The design concept is to realize submicron-level fabrication by micron-level technology. ⺠The fabrication technology is simple, reproducible, ingenious, low-cost, high-yield. ⺠The method can avoid the limitation of lithography and rigorous fabrication condition. ⺠The as-prepared submicron-gap electrodes have potential for bio-electronic devices.
Related Topics
Physical Sciences and Engineering
Materials Science
Biomaterials
Authors
Xuejiao Chen, Jian Zhang, Huhua Xu, Shichao Hui, Meiguang Zhu,