Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1430965 | Materials Science and Engineering: C | 2007 | 4 Pages |
Abstract
In this paper, we present a detailed study and analysis of piezoresistive effects on a membrane suspended in air based sensor. The variation of its capacitance under flow of stress or gas is investigated. The developed approach allows us to extract the material parameters in accurate way.
Related Topics
Physical Sciences and Engineering
Materials Science
Biomaterials
Authors
L. Kaabi, A. Kaabi, J. Sakly, F. AbdelMalek,