Article ID Journal Published Year Pages File Type
1430965 Materials Science and Engineering: C 2007 4 Pages PDF
Abstract

In this paper, we present a detailed study and analysis of piezoresistive effects on a membrane suspended in air based sensor. The variation of its capacitance under flow of stress or gas is investigated. The developed approach allows us to extract the material parameters in accurate way.

Related Topics
Physical Sciences and Engineering Materials Science Biomaterials
Authors
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