Nanoindentation and nanoscratch profiles of hybrid films based on (γ-methacrylpropyl)trimethoxysilane and tetraethoxysilane

Based on silsesquioxanes (SSO) derived from the hydrolytic condensation of (γ-methacrylpropyl)trimethoxysilane (MPMS) and tetraethoxysilane (TEOS), hybrid films were prepared using the sol–gel process. Nanoindentation and nanoscratch tests were carried out to study the influence of different amounts of TEOS in the hybrid films on testing profiles. The film containing an adequate amount of TEOS (20 wt.%) was found to possess the best elasto-plastic behaviour based on the profiles in the four regions, including the surface, a maximum value, a constant value and a substrate-effect region, as well as the best scratch resistance based on the scratch profiles in the three regions, including the surface, the residual depth and the fluctuation regions. The morphology and the critical load of the film were also provided for evidence.