In-situ X-ray diffraction studies and magneto-optic Kerr effect on RF sputtered thin films of BaTiO3 and Co, Nb co-doped BaTiO3

The effect of annealing on structural and magnetic properties of the RF sputtered BaTiO3 and Co, Nb co-doped BaTiO3 thin films on Si (001) substrates were studied. The structure of the as-deposited (amorphous) films was changed into cubic perovskite phase during the in-situ X-ray diffraction from room temperature to 900 °C. The enhancement of crystalline quality with respect to the increase of annealing temperature was observed by the in-situ XRD. The magnetic properties of the films before and after annealing were studied by the measurement of Magneto-Optic Kerr Effect (MOKE). The pure BaTiO3 revealed a paramagnetic behavior, whereas the Co and Nb co-doped BaTiO3 films exhibited room temperature ferromagnetism. The increase in ferromagnetic response was observed in the Co and Nb co-doped BaTiO3 films annealed at 900 °C rather than the as-deposited film.