Article ID Journal Published Year Pages File Type
1461093 Ceramics International 2014 7 Pages PDF
Abstract

A thermodynamic calculation on co-deposition of ZrC–SiC from the ZrCl4–C3H6–MTS–H2–Ar system was performed using the FactSage thermochemical software and verification experiments were performed. The surface diagrams of condensed-phases in this system were expressed as functions of the deposition temperature, total pressure, reactant ratio of MTS/(MTS+C3H6) and ratio of H2/(ZrCl4+MTS+C3H6), and the composition of the products was determined by the diagram. The calculation results indicate that their yields strongly depend on the molar ratio of the injected reactants and temperature, and ZrC–SiC can be co-deposited under a proper condition. The experimental results show that ZrC–SiC coating was successfully co-deposited on graphite substrates and carbon fibers according to the thermodynamic calculation.

Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
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