Preparation of (100) CeO2 and (110) YBa2Cu3O7−δ films by laser chemical vapor deposition

CeO2 and YBa2Cu3O7−δ (YBCO) films were prepared by laser chemical vapor deposition. The (100)-oriented CeO2 films prepared at 975–1088 K consisted of columnar grains with pyramidal caps of the CeO2 {111} planes. The deposition rate was 3.0–5.4 μm h−1. The (110)-oriented YBCO films were prepared on the (100)-oriented CeO2 films at a deposition temperature of 1004 K. The (110)-oriented YBCO films showed wedge-shaped grains.