Tin oxide thin films deposited by ultrasonic spray pyrolysis

This study investigated microstructure of SnO2 thin films deposited by ultrasonic spray pyrolysis technique using 0.2 M of SnCl4·5H2O in absolute ethanol as a precursor. The deposition temperature (350–450 °C) and time (20–90 min) were varied. The influence of film-deposition conditions on grain size and orientation were discussed. The deposited SnO2 films were textured polycrystalline films. The preferred orientation of SnO2 films were quantitatively evaluated by texture coefficient (TC). The mean grain size and film thickness determined by SEM could be controlled over a range of 50–325 nm and 80–2690 nm, respectively.